Now showing items 1-1 of 1

  • Mirage-effect-based depth profiling of micromachined silicon structures 

    Tuli, Suneet; Bhattacharyya, Amalendu B; Forget, Benoit C; Fournier, Daniele (1998)
    A contact,non-destructive techique for the depth profiling of micromachined structures is presented.Based on the mirage or optical beam deflection method of photothermal spectrosocpy, an expremental measurement of a 8p.m ...