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|Title: ||Hydrogen Profiling and the Stoichiometry of an a-Sin:H Film|
|Authors: ||Avasthi, D K|
Acharya, M G
Tarey, R D
Malhotra, L K
Mehta, G K
|Keywords: ||conventional elastic recoil detection analysis|
using 90 MeV 58 Ni ions.
non-uniformity in H concentration
film thickness is about 12%.
simultaneous multi-element detection
|Issue Date: ||1995|
|Citation: ||I/acuum 46( 3 ) 265 - 267|
|Abstract: ||The stoichiometry of a-SiN, : H films is determined by conventional elastic recoil detection analysis (ERDA) using 90 MeV 58 Ni ions. Hydrogen depth profiling indicated that the non-uniformity in H concentration across the film thickness is about 12%. The present experiment indicated the capability of conventional ERDA for
simultaneous multi-element detection in a thin film sample (having well-separated masses) without the use of a sophisticated detection system.|
|Appears in Collections:||Physics|
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