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Please use this identifier to cite or link to this item: http://eprint.iitd.ac.in/handle/2074/112

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dc.contributor.authorAvasthi, D K-
dc.contributor.authorAcharya, M G-
dc.contributor.authorTarey, R D-
dc.contributor.authorMalhotra, L K-
dc.contributor.authorMehta, G K-
dc.date.accessioned2005-03-24T05:15:59Z-
dc.date.available2005-03-24T05:15:59Z-
dc.date.issued1995-
dc.identifier.citationI/acuum 46( 3 ) 265 - 267en
dc.identifier.urihttp://eprint.iitd.ac.in/dspace/handle/2074/112-
dc.description.abstractThe stoichiometry of a-SiN, : H films is determined by conventional elastic recoil detection analysis (ERDA) using 90 MeV 58 Ni ions. Hydrogen depth profiling indicated that the non-uniformity in H concentration across the film thickness is about 12%. The present experiment indicated the capability of conventional ERDA for simultaneous multi-element detection in a thin film sample (having well-separated masses) without the use of a sophisticated detection system.en
dc.format.extent297547 bytes-
dc.format.mimetypeapplication/pdf-
dc.language.isoen-
dc.subjectconventional elastic recoil detection analysisen
dc.subjectusing 90 MeV 58 Ni ions.en
dc.subjectnon-uniformity in H concentrationen
dc.subjectfilm thickness is about 12%.en
dc.subjectsimultaneous multi-element detectionen
dc.titleHydrogen Profiling and the Stoichiometry of an a-Sin:H Filmen
dc.typeArticleen
Appears in Collections:Physics

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