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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2074/112
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| Title: | Hydrogen Profiling and the Stoichiometry of an a-Sin:H Film |
| Authors: | Avasthi, D K
Acharya, M G
Tarey, R D
Malhotra, L K
Mehta, G K |
| Keywords: | conventional elastic recoil detection analysis
using 90 MeV 58 Ni ions.
non-uniformity in H concentration
film thickness is about 12%.
simultaneous multi-element detection |
| Issue Date: | 1995 |
| Citation: | I/acuum 46( 3 ) 265 - 267 |
| Abstract: | The stoichiometry of a-SiN, : H films is determined by conventional elastic recoil detection analysis (ERDA) using 90 MeV 58 Ni ions. Hydrogen depth profiling indicated that the non-uniformity in H concentration across the film thickness is about 12%. The present experiment indicated the capability of conventional ERDA for
simultaneous multi-element detection in a thin film sample (having well-separated masses) without the use of a sophisticated detection system. |
| URI: | http://eprint.iitd.ac.in/dspace/handle/2074/112 |
| Appears in Collections: | Physics
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| avahyd95.pdf | | 290Kb | Adobe PDF | View/Open |
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