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Please use this identifier to cite or link to this item: http://eprint.iitd.ac.in/handle/2074/112

Title: Hydrogen Profiling and the Stoichiometry of an a-Sin:H Film
Authors: Avasthi, D K
Acharya, M G
Tarey, R D
Malhotra, L K
Mehta, G K
Keywords: conventional elastic recoil detection analysis
using 90 MeV 58 Ni ions.
non-uniformity in H concentration
film thickness is about 12%.
simultaneous multi-element detection
Issue Date: 1995
Citation: I/acuum 46( 3 ) 265 - 267
Abstract: The stoichiometry of a-SiN, : H films is determined by conventional elastic recoil detection analysis (ERDA) using 90 MeV 58 Ni ions. Hydrogen depth profiling indicated that the non-uniformity in H concentration across the film thickness is about 12%. The present experiment indicated the capability of conventional ERDA for simultaneous multi-element detection in a thin film sample (having well-separated masses) without the use of a sophisticated detection system.
URI: http://eprint.iitd.ac.in/dspace/handle/2074/112
Appears in Collections:Physics

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