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Please use this identifier to cite or link to this item: http://eprint.iitd.ac.in/handle/2074/1280

Title: On the determination of the sp3 to sp2 ratio in diamond-like carbon thin films
Authors: Mahajan, Somna S
Barshilia, H C
Mehta, B R
Vankar, V D
Keywords: Carbon
Chemical vapour deposition
Ellipsometry
Optical properties
Issue Date: 1997
Citation: Thin Solid Films, 302(1-2), 250-255
Abstract: The carbon bonding ratio in diamond-like carbon (DLC) thin films has been estimated from the ε2 spectra obtained by spectroscopic ellipsometry. A method has been developed to find out the atomic fractions of sp3- and sp2-bonded carbon atoms by combining the various features of the existing methods. The atomic fraction of sp2-bonded carbon atoms has been determined by fitting the gaussian curves in the experimentally observed ε2, spectra in the low energy range (< 4 eV). The atomic fraction of sp3-bonded carbon atoms has been determined by calculating the total electron density in the DLC matrix. The amount of hydrogen present in DLC films has also been taken into account.
URI: http://eprint.iitd.ac.in/dspace/handle/2074/1280
Appears in Collections:Physics

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