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Please use this identifier to cite or link to this item: http://eprint.iitd.ac.in/handle/2074/1696

Title: Feed optimization for the slotted line antenna for high-density plasma production
Authors: Ganguli, A
Baskaran, R
Pandey, H D
Keywords: feed structures
slotted line antenna
Issue Date: 1990
Citation: Plasma Science, IEEE Transactions on, 18(1), 134 - 141p.
Abstract: nvestigations on the optimization of feed structures for exciting the slotted line antenna for high-density plasma production are presented. Each feed structure used (except the direct feed) excites a preferred component of the wave electric/magnetic field. It is seen that the efficacy of plasma production using the different feeds depends directly on the relative importance of the field components (which the feeds excite) for the flow wave mode of the antenna. The optimal feed is shown to be a dipole antenna, oriented so as to excite the radial component of the electric field within the slotted line structure. The plasma characterization results as a function of the input microwave power and the magnetic field in the antenna region are also presented and discussed. The ability of the antenna to maintain high-density plasmas well away from electron-cyclotron resonance is demonstrated
URI: http://eprint.iitd.ac.in/dspace/handle/2074/1696
Appears in Collections:Energy Studies [CES]

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