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Please use this identifier to cite or link to this item: http://eprint.iitd.ac.in/handle/2074/2308

Title: Room-temperature deposition of diamond-like carbon films by the microwave plasma jet method
Authors: Mehta, B R
Ogryzlo, E A
Keywords: diamond-like carbon
ionic species
nozzle and bombard
silicon and polycarbonate
15–19.5 GPa
Issue Date: 1993
Citation: Diamond and Related Materials, 3(1-2), 10-13p.
Abstract: Modifications have been incorporated in the conventional microwave-assisted chemical vapour deposition process to deposit diamond-like carbon (DLC) coatings on polycarbonate substrates. In the modified method, the substrates to be coated are placed outside the plasma chamber. An electric field is applied across the microwave discharge. The accelerated ionic species leave the nozzle and bombard the substrates placed in a separate chamber. Using the present technique, DLC films have been deposited on silicon and polycarbonate substrates. These films show chemical inertness and hardness values in the range 15–19.5 GPa.
URI: http://eprint.iitd.ac.in/dspace/handle/2074/2308
Appears in Collections:Physics

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