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Please use this identifier to cite or link to this item: http://eprint.iitd.ac.in/handle/2074/249

Title: High energy ion beam induced modifications in diamond and diamond like carbon thin films
Authors: Dilawar, N
Sah, S
Mahta, B R
Vankar, V D
Avasthi, D K
Mehta, G K
Keywords: Diamond
Hexagonal carbon
Parameters
Hot-filament
Carbon
Issue Date: 1996
Citation: Vacuum, 47(11), 1269-1274
Abstract: Diamond and DLC thin films deposited using hot-filament chemical vapour deposition technique at various parameters were irradiated with 50 MeV ST’ ions. The resulting microstructural changes were studied using X-ray diffraction and scanning electron microscopy. All the samples showed the development of B-Sic and hexagonal carbon phases at the expense of the diamond/DLC phase. The ERD analysis was carried out to determine the hydrogen concentration and its distribution in DLC films. The absolute hydrogen concentration in DLC samples is of the order of lti2 atoms/c& which gets depleted on irradiation. The DLC samples show a clear dependence of hydrogen content on the deposition parameters.
URI: http://eprint.iitd.ac.in/dspace/handle/2074/249
Appears in Collections:Physics

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