|
EPrints@IIT Delhi >
Faculty Research Publicatons >
Applied Research in Electronics [CARE] >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/2074/628
|
| Title: | Mirage-effect-based depth profiling of micromachined silicon structures |
| Authors: | Tuli, Suneet
Bhattacharyya, Amalendu B
Forget, Benoit C
Fournier, Daniele |
| Keywords: | Depth profiling
Micromachining
Mirage effect
Silicon |
| Issue Date: | 1998 |
| Citation: | Sensors and actuators A, 64(3), 203-207 |
| Abstract: | A contact,non-destructive techique for the depth profiling of micromachined structures is presented.Based on the mirage or optical beam deflection method of photothermal spectrosocpy, an expremental measurement of a 8p.m step in silicon is given by way of illustration. |
| URI: | http://eprint.iitd.ac.in/dspace/handle/2074/628 |
| Appears in Collections: | Applied Research in Electronics [CARE]
|
Files in This Item:
| File |
Description |
Size | Format |
|---|
| tulmir1998.pdf | | 171Kb | Adobe PDF | View/Open |
|
Show full item record
All items in DSpace are protected by copyright, with all rights reserved.
|
