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Please use this identifier to cite or link to this item: http://eprint.iitd.ac.in/handle/2074/65

Title: Study of Hydrogen in DLC Film by ERDA with 58Ni Ions
Authors: Avasthi, D K
Kabiraj, D
Jaipal
Mehta, G K
Barshilia, H C
Sah, Somna
Mehta, B R
Vankar, V D
Keywords: hydrogen in DLC film
ERDA
58Ni ions
Ni ions
diamond like carbon
DLC
Elastic Recoil Detection Analysis
Issue Date: 1995
Citation: Vacuum, 46, 633-636
Abstract: The content of hydrogen and its depth profile in diamond like carbon (DLCI films deposited by the microwave plasma deposition technique is determined by Elastic Recoil Detection Analysis (ERDA) using 85 MeV 58Ni ions. Simultaneous detection of hydrogen and carbon recoils provided a method to determine the relative number of hydrogen : carbon atoms without using a standard H sample for quantitative calibration.
URI: http://eprint.iitd.ac.in/dspace/handle/2074/65
Appears in Collections:Physics

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