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Please use this identifier to cite or link to this item:
http://hdl.handle.net/2074/65
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| Title: | Study of Hydrogen in DLC Film by ERDA with 58Ni Ions |
| Authors: | Avasthi, D K Kabiraj, D Jaipal Mehta, G K Barshilia, H C Sah, Somna Mehta, B R Vankar, V D |
| Keywords: | hydrogen in DLC film ERDA 58Ni ions Ni ions diamond like carbon DLC Elastic Recoil Detection Analysis |
| Issue Date: | 1995 |
| Citation: | Vacuum, 46, 633-636 |
| Abstract: | The content of hydrogen and its depth profile in diamond like carbon (DLCI films deposited by the microwave plasma deposition technique is determined by Elastic Recoil Detection Analysis (ERDA) using 85 MeV 58Ni ions. Simultaneous detection of hydrogen and carbon recoils provided a method to determine the relative
number of hydrogen : carbon atoms without using a standard H sample for quantitative calibration. |
| URI: | http://eprint.iitd.ac.in/dspace/handle/2074/65 |
| Appears in Collections: | Physics
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