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Please use this identifier to cite or link to this item: http://eprint.iitd.ac.in/handle/2074/662

Title: Growth of diamond thin films in a cyclic growth–etch oxy-acetylene flame process
Authors: Kapil, R
Mehta, B R
Vankar, V D
Roy, C
Pradhan, A
Keywords: Diamond thin films
Oxy-acetylene flame process
Etching
Issue Date: 1998
Citation: Thin Solid Films, 322(1-2), 74–84
Abstract: Diamond thin films have been grown using a cyclic growth–etch oxy-acetylene flame process on Si, W and Mo substrates. This process resulted into the growth of cubic diamond, 8H and 15R polytypes of diamond. The results suggest that cubic diamond grows with.The formation of intermediate low-symmetry polytypes. Glancing angle X-ray diffraction XRD and micro Raman spectroscopy techniques have been used to characterize these films. The relative growth of various polytypes have been found to be a strong function of acetylene to oxygen flow ratio, speed of rotation and the substrate materials.
URI: http://eprint.iitd.ac.in/dspace/handle/2074/662
Appears in Collections:Physics

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