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EPrints@IIT Delhi >
Items for Author Agnihotri, O P in All of DSpace
Showing 5 items.
| Date of Issue | Title |
Authors |
|---|
| 1995 | The dependence of etch rate of photo- CVD silicon nitride films on NH4F content in buffered HF | Rathi, V K; Gupta, Manju; Agnihotri, O P |
| 2004 | Dependence of hydrogen and oxygen incorporation on deposition parameters in photochemical vapor deposited mercury free silicon nitride films | Sahu, B S; Srivastava, P; Agnihotri, O P; Lee, H C; Sekhar, B R; Mahapatra, S; Tiwari, M K |
| 1995 | Photo-processing of silicon nitride | Rathi, V K; Gupta, Manju; Thangaraj, R; Chari, K S; Agnihotri, O P |
| 1991 | The preparation, properties and applications of silicon nitride thin films deposited by plasma-enhanced chemical vapor deposition | Gupta, Manju; Rathi, V K; Thangaraj, R; Agnihotri, O P; Chari, K S |
| 2002 | Role of incorporated hydrogen in non-stoichiometric photo-deposited silicon nitride films | Sahu, B S; Srivastava, P; Sehgal, H K; Agnihotri, O P |
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