Avasthi, D K; Acharya, M G; Tarey, R D; Malhotra, L K; Mehta, G K
conventional elastic recoil detection analysis; using 90 MeV 58 Ni ions.; non-uniformity in H concentration; film thickness is about 12%.; simultaneous multi-element detection
The stoichiometry of a-SiN, : H films is determined by conventional elastic recoil detection analysis (ERDA) using 90 MeV 58 Ni ions. Hydrogen depth profiling indicated that the non-uniformity in H concentration across the film thickness is about 12%. The present experiment indicated the capability of conventional ERDA for
simultaneous multi-element detection in a thin film sample (having well-separated masses) without the use of a sophisticated detection system.