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Comparative study of crystallization processes in Sb2Te3 films using laser and thermal annealing techniques

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Author: Reddy, G B; Dhar, A; Malhotra, L K; Sharmila, E K

Advisor: Advisor

Date: 1992

Publisher:
Citation: Thin Solid

Series/Report no.:
Item Type: Article

Keywords: pin-hole free amorphous; disk-shaped crystallized; thermal crystallization; amorphous states

Abstract: Adherent and pin-hole free amorphous Sb2Te3 thin films have been obtained by vacuum evaporation at substrate temperatures ≤25 °C. The films have been crystallized by thermal and laser annealing, and the crystallization processes monitored as a function of annealing temperature and laser scan speed. A comparative study of topography reveals disk-shaped crystallized areas in thermal crystallization and dendrite growth in the laser induced process. The crystallized films in both cases contain a single Sb2Te3 phase. Activation energy of 2 eV for crystallization, determined using differential scanning calorimetery indicates good room temperature stability of the amorphous states.
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Shankar B. Chavan
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Shankar B. Chavan
Computer Applications Division
Central Library, IIT Delhi
shankar.chavan@library.iitd.ac.in
NDLTD
Shodhganga
NDL
ePrints@IISc
etd@IISc
IR@IIT Bombay
NewsClips @IITD
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