Author: | Reddy, G B; Dhar, A; Malhotra, L K; Sharmila, E K |
Advisor: | Advisor |
Date: | 1992
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Publisher: | |
Citation: | Thin Solid
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Series/Report no.: |
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Item Type: | Article
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Keywords: | pin-hole free amorphous; disk-shaped crystallized; thermal crystallization; amorphous states |
Abstract: | Adherent and pin-hole free amorphous Sb2Te3 thin films have been obtained by vacuum evaporation at substrate temperatures ≤25 °C. The films have been crystallized by thermal and laser annealing, and the crystallization processes monitored as a function of annealing temperature and laser scan speed. A comparative study of topography reveals disk-shaped crystallized areas in thermal crystallization and dendrite growth in the laser induced process. The crystallized films in both cases contain a single Sb2Te3 phase. Activation energy of 2 eV for crystallization, determined using differential scanning calorimetery indicates good room temperature stability of the amorphous states. |