Avasthi, D K; Kabiraj, D; Jaipal; Mehta, G K; Barshilia, H C; Sah, Somna; Mehta, B R; Vankar, V D
hydrogen in DLC film; ERDA; 58Ni ions; Ni ions; diamond like carbon; DLC; Elastic Recoil Detection Analysis
The content of hydrogen and its depth profile in diamond like carbon (DLCI films deposited by the microwave plasma deposition technique is determined by Elastic Recoil Detection Analysis (ERDA) using 85 MeV 58Ni ions. Simultaneous detection of hydrogen and carbon recoils provided a method to determine the relative
number of hydrogen : carbon atoms without using a standard H sample for quantitative calibration.