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  • Hydrogen Profiling and the Stoichiometry of an a-Sin:H Film 

    Avasthi, D K; Acharya, M G; Tarey, R D; Malhotra, L K; Mehta, G K (1995)
    The stoichiometry of a-SiN, : H films is determined by conventional elastic recoil detection analysis (ERDA) using 90 MeV 58 Ni ions. Hydrogen depth profiling indicated that the non-uniformity in H concentration across the ...