Search

Now showing items 1-1 of 1

Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies

Rasheed, B G; Mavi, H S; Shukla, A K; Abbi, S C; Jain, K P (2001)

A comparative study of porous silicon (PS) fabricated by laser-induced etching on n-type crystalline-silicon and n-type polysilicon substrates is presented here under near resonance conditions by employing a Nd:YAG laser. ...