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Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies
A comparative study of porous silicon (PS) fabricated by laser-induced etching on n-type crystalline-silicon and n-type polysilicon substrates is presented here under near resonance conditions by employing a Nd:YAG laser. ...
Surface morphology and formation of GaAs nanocrystals by laser-induced etching: SEM, PL and Raman studies
GaAs nanostructures were prepared by a laser-induced etching process using a Nd:YAG (λ=1.06 μm) laser. Scanning electron microscope (SEM) was used to monitor changes in surface morphology produced on etching. The etched ...