Investigations on inductively coupled plasma interaction with compound semiconductor materials for etching applications

Thumbnail
View/Open
TH-4243.pdf


Collections
Metadata
Show full item record
Author: Rawal, Dipendra Singh
Advisor: Malik, Hitendra K.
Date: 2012
Publisher: IIT Delhi
Citation:
Series/Report no.: TH-4243;
Item Type: Thesis
Keywords: Semiconductor materials; Plasma interaction
Abstract: